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PLASMA SYSTEMS

[ PRODUCTION OF SPECIAL PLASMA SYSTEMS ]



Special system Tetra-30-LF-PC


Technical data:

Control cabinet:
W 800 mm, H 600 mm, D 500 mm
W 31.5 in, H 23.6 in, D 19.7 in
Chamber:
W 240 mm, H 150 mm, D 240 mm
W 9.4 in, 5.9 in, 9.4 in
Chamber volume:
approx. 30 litres (8 gallons)
Gas supply:
1 gas channel via MFC
Generator:
1 pc. 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system can be integrated into an production line.

A short cycle plasma system can easily be integrated into an existing production line. This automatic system will also reduce operator error.



Special system Tetra-100-LF-PC


Technical data:

Control cabinet:
W 2,000 mm, H 2,200 mm, D 2,000 mm
W 78.7 in, H 86.6 in, D 78.7 in
Chamber:
W 700 mm, H 200 mm, D 700 mm
W 27.5 in, H 7.9 in, D 27.5 in
Chamber volume:
approx. 100 litres (26 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system has a fully automatic drawer door.

The plasma system Tetra -100 with 100 litres of chamber volume and a fully automatic door is PC controlled and used primarily for serial production (cleaning, etching and activation).



Special system Tetra-120-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,150 mm, D 1,000 mm
W 23.6 in, H 84.6 in, D 39.4 in
Chamber:
W 1,200 mm, H 150 mm, D 1,700 mm
W 47.2 in, H 5.9 in, D 66.9 in
Chamber volume:
approx. 120 litres (32 gallons)
Gas supply:
4 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system has a fully automatic door.

The plasma system Tetra -120 with 120 litres of chamber volume and a fully automatic door is PC controlled and used primarily for serial production (cleaning, etching and activation).



Special system Tetra-140-LF-PC


Technical data:

Control cabinet:
W 1,000 mm, H 1,800 mm, D 1,000 mm
W 39.4 in, H 70.8 in, D 39.4 in
Chamber:
W 1,000 mm, H 100 mm, D 1,400 mm
W 39.4 in, H 3.9 in, D 55.1 in
Chamber volume:
approx. 140 litres (37 gallons)
Gas supply:
2 gas channels via MFCs, liquid monomer dispensor
for plasma polymerization
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra -140-LF-PC with 140 litres of chamber volume is PC controlled and used primarily for serial production (cleaning, etching, activation and plasma polymerization).



Special system Tetra-150-LF-PC


Technical data:

Control cabinet:
W 1,000 mm, H 2,100 mm, D 1,000 mm
W 39.4 in, H 82.7 in, D 39.4 in
Chamber:
W 400 mm, H 600 mm, D 625 mm
W 15.7 in, H 23.6 in, D 24.6 in
Chamber volume:
approx. 150 litres (40 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
Roll to roll for rolls that are 400 mm (15.7 in) wide and 300 mm (11.81 in) diameter..

The plasma system Tetra -150 - LF - PC with 150 litres of chamber volume is PC controlled and used primarily for the serial production of textile materials on which different monomers are plasma polymerized.



Special system Tetra-240-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 1,700 mm, D 3,200 mm
W 23.6 in, H 66.9 in, D 126 in
Chamber:
W 305 mm, H 300 mm, D 2,600 mm
W 12 in, H 11.8 in, D 102.4 in
Chamber volume:
approx. 240 litres (63 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 240 with 240 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-375-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 800 mm
W 23.6 in, H 82.7 in, D 31.5 in
Chamber:
W 600 mm, H 360 mm, D 1,900 mm
W 23.6 in, H 14.2 in, D 74.8 in
Chamber volume:
approx. 375 litres (99 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra-375 with 375 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-400-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 650 mm
W 23.6 in, H 82.7 in, D 25.6 in
Chamber:
W 915 mm, H 750 mm, D 725 mm
W 36 in, H 29.5 in, D 28.5 in
Chamber volume:
approx. 400 litres (106 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Automation:
The system has a fully automatic sliding door.

The plasma system Tetra - 400 with 400 litres of chamber volume and a fully automatic sliding door is PC controlled and used primarily for serial production (cleaning, etching and activation).



Special system Tetra-420-LF-PC-PCB


Technical data:

Control cabinet:
W 1,600 mm, H 2,100 mm, D 1,200 mm
W 63 in, H 82.7 in, D 47.2 in
Chamber:
W 750 mm, H 800 mm, D 750 mm
W 29.5 in, H 31.5 in, D 29.5 in
Chamber volume:
approx. 420 litres (111 gallons)
Gas supply:
4 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 420 with 420 litres of chamber volume is PC controlled and used primarily for production of PCBs (desmear process, cleaning, etching and activation).



Special system Tetra-500-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,100 mm, D 800 mm
W 23.6 in, H 82.6 in, D 31.5 in
Chamber:
W 1,500 mm, H 1,700 mm, D 200 mm
W 59 in, H 66.9 in, D 7.9 in
Chamber volume:
approx. 500 litres (132 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
2 roll-to-roll systems
Control:
PC controlled (Windows) with industrial fieldbus

The Tetra - 500 with the roll-to-roll system and 500 litres of chamber volume is PC controlled and used primarily for serial production (cleaning, etching and activation) such as foil.



Special system Tetra-600-LF-PC Version 1


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, 86.6 in, D 31.5 in
Chamber:
W 1,000 mm, H 1,000 mm, D 600 mm
W 39.4 in, H 39.4 in, D 23.6 in
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 MHz)
Trays:
Up to 11 trays
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 600 with 600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-600-LF-PC Version 2


Technical data:

Control cabinet:
W 1,800 mm, H 1,800 mm, D 800 mm
W 70.9 in, H 70.9 in, D 31.5 in
Chamber:
W 580 mm, H 730 mm, D 1,000 mm
W 22.8 in, H 28.7 in, D 39.4 in,
door with 2 windows
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFC
Generator:
1 pc. at 40 kHz, automatic matching
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 600 with 600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-600-LF-PC-D Version 1


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
Ø 1,100 mm, D 700 mm
Ø 43.3 in, D 27.6 in
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Rotary drum (with four baskets, 30 litres each)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 600 with 600 litres of chamber volume and a rotary drum is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-600-LF-PC-D Version 2


Technical data:

Control cabinet:
W 1,000 mm, H 2,200 mm, D 1,800 mm
W 39.4 in, H 86.6 in, D 70.9 in
Chamber:
Ø 1,000 mm, D 750 mm
Ø 39.4 in, D 29.5 in,
door with two windows
Chamber volume:
approx. 600 litres (159 gallons)
Gas supply:
2 gas channels via MFC
Generator:
4 pcs. with 40 kHz each
automatic matching
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 600 with 600 litres of chamber volume and a rotary drum is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-2.000-LF-PC


Technical data:

Chamber:
W 1,000 mm, H 2,000 mm, D 1,000 mm
W 39.4 in, H 78.7 in, D 39.4 in
Chamber volume:
approx. 2,000 litres (529 gallons)
Gas supply:
2 gas channels via MFC
Generator:
1 pc. 13.56 MHz
Trays:
Up to 10 trays
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 2000 with 2,000 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and activation).



Special system Tetra-2400-LF-PC


Technical data:

Control cabinet:
W 600 mm, H 2,200 mm, D 800 mm
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
Ø 1,100 mm, D 2,500 mm
Ø 43.3 in, D 98.4 in
Chamber volume:
approx. 2,400 litres (635 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Rotary drum (with 16 baskets, 30 litres each)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 2400 with 2,400 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-2800-LF


Technical data:

Control cabinet:
W 600 mm, H 1,700 mm, D 800 mm
W 23.6 in, H 66.9 in, D 31.5 in
Chamber:
Ø 1,200 mm, D 2,500 mm
Ø 47.2 in, D 98.4 in
Chamber volume:
approx. 2,800 litres (740 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 2800 with 2,800 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-4400-LF-PC:


Technical data:

Control cabinet:
W 1,800 mm, H 1,000 mm, D 800 mm
W 70.8 in, H 39.4 in, D 31.5 in
Chamber:
L 1,350 mm, D 1,250 mm, H 2,600 mm
L 53.1 in, D 49.2 in, H 102.4 in
Chamber volume:
approx. 4,400 litres (1164 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus
Features:
oxygen generator
roots pump plasma exhaust cleaner

The plasma system Tetra - 4400 - LF - PC with 4,400 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching and activation).



Special system Tetra-5600-LF-PC


Technical data:

Control cabinet:
W 1,800 mm, H 2,200 mm, D 1,800 mm
W 70.8 in, H 86.6 in, D 70.8 in
Chamber:
W 2,250 mm, H 2,450 mm, D 1,000 mm
W 88.6 in, H 96.5 in, D 39.4 in
Chamber volume:
approx. 5,600 litres (1,481 gallons)
Gas supply:
3 gas channels via MFCs
Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 GHz)
Trays:
Trolleys are used to load the chamber
(Optional: special drum)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 5600 - LF - PC with 5,600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and activation).



Special system Tetra-7000-LF-PC


Technical data:

Control cabinet:
W 2,400 mm, H 2,300 mm, D 1,000 mm
W 94.5 in, H 90.5 in mm, D 39.4 in mm
Chamber:
W 2,400 mm, H 2,100 mm, D 1,400 mm
W 94.5 in, H 82.7, D 55.1 in
Chamber volume:
approx. 7,000 litres (1,852 gallones)
Gas supply:
3 gas channels via MFCs
Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 7000 - LF - PC with the roll-to-roll system and 7,000 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, activation and coating).



Special system Tetra-7500-LF-PC


Technical data:

Control cabinet:
W 3,000 mm, H 2,000 mm, D 1,000 mm
W 118.1 in, H 78.7 in, D 39.4 in
Chamber:
W 1,500 mm, H 2,000 mm, D 2,500 mm
W 59 in, H 78.7 in, D 98.4 in
Chamber volume:
approx. 7,500 litres (1,984 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
6 pcs with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra - 7500 - LF - PC with 7,500 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning, etching, and activation).



Special system Tetra-12.600-LF-PC


Technical data:

Control cabinet:
W 1,200 mm, H 2,200 mm, D 800 mm
W 47.2 in, H 86.6 in, D 31.5 in
Chamber:
W 2,400 mm, H 2,100 mm, D 2,500 mm
W 94.5 in, H 82.7 in, D 98.4 in
Chamber volume:
approx. 12,600 litres (3,333 gallons)
Gas supply:
2 gas channels via MFCs
Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHZ or 2.45 GHz)
Trays:
Trolleys are used to load the chamber
Control:
PC controlled (Windows) with industrial fieldbus

The plasma system Tetra-12600 with 12,600 litres of chamber volume is PC controlled and is used primarily for serial production (cleaning and activation).


   
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