Technical Data:
Plasma cleaner Zepto
switchgear cabinet :
W 425 mm, H 185 mm, D 450 mm
chamber:
glass, Ø 105 mm, L 300 mm
chamber volume:
approx. 2,6 litres
gas supply:
2 gas supplies through needle valve
generator:
40kHz/100W or 13.56 MHz/50W fixed matching
vacuum pump:
suction power: 2 m³/h
tray:
1 pc. tray
control:
manual, process time by analog timer
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Low-cost Plasma system ZEPTO:
process development, cleaning,
activatng,
etching (small series)
PRICE: on request |
