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STANDARD PLASMA SYSTEMS
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[ RF-GENERATORS - AUTOMATCHING FOR GENERATORS ]
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Area of application:
Automatic or manual adjustment of a 13.56 MHz High Frequency (HF) generator to low-pressure plasma. |
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AUTOMATCHING FOR 13.56 MHz
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HF power range: 300 Watt /
600 Watt
Frequency: 13.56 MHz
HF operating mode:
continuous or pulsed
Impedance: 50 Ohm
Input connector: type N jack connector
Output impedance: appropriate for all plasma chambers from Diener electronic with a volume up to 150 liters
HF output: type N built-in jack connectors up to 100 Watt or 7/16 built-in jack connectors up to 300 Watt
Especially suitable for use with HF generators from Diener electronic or other 300 Watt HF generators for 13.56 MHz that provide a 0-10 volt signal for power forward or return loss.
Equipped with a microcontroller system that can function by itself or from a PC
Remote control connection for:
- Default start setting parameters
- Settings from operating mode manual / auto
- Acknowledgement of current settings
RS232 interface for software updates or remote control
Supply voltage: 88-264 VAC / 47-63 Hz
Power input: Max. 65 Watt
Power supply: IEC
Weight: approx. 20 kg
Size: 19 inch drawer; 3HE
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Please contact us because of technical advice for these systems. |
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