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STANDARD PLASMA SYSTEMS

 

[ RF-GENERATORS - 13.56 MHz - 100 watts]

   
  Application range in plasma systems:
  • low pressure plasma
  • dielectric heating
   
   
 

RF generator 13.56 MHz, 100 W

 
 
  • Rated RF power output: 100 Watts
  • Frequency: 13.560 MHz ± 100ppm
  • Adjustable RF power range :
       0 - 100 Watts, continous
  • Generator can be pulsed:
       Min. on-time: 5µs
  • Impedance: 50 Ohms
  • RF stability: less than 5 %
       (depends on the adjusting device)
  • Load missmatch protection (built-in)    against open output and short circuit
  • Regulation tolerance load:
        VSWR = 1.2
  • Capable of switching power to 100 %    immediately
  • Mains input : 88 - 264 VAC / 47 - 63    Hz (when combined with external    power supply )
  • Mains power consumption:
       max. 220 Watts
  • Remote interface connector intended
       for :
        - RF switch ON/OFF
        - RF power adjustment
         (0...10V = 0...100%)
  • RF output: N connector
  • Power connector : for external
       power supply
  • Weight: approx. 6.5 kg (generator)
       plus 1.0 kg (power supply)
 
Plasmaanlage TETRA-30-LF mit vollautomatischer Steuerung. Konzipiert für die Produktion: Plasma Reinigung, Plasma Aktivierung, Plasma Ätzung - Plasma Cleaner
Plasmaanlage TETRA-30-LF mit vollautomatischer Steuerung. Konzipiert für die Produktion: Plasma Reinigung, Plasma Aktivierung, Plasma Ätzung - Plasma Cleaner

RF generator 100


 

   
   
  Please contact us because of technical advice for these systems.
   
   
   
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