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STANDARD PLASMA SYSTEMS

 

[ FEMTO UHP]

   
  1,9 litres laboratory system FEMTO UHP (Ultra High Purity) with semi-automatic control is mainly used for:
  • small scale production
  • analysis (SEM, TEM)
  • medical technology
  • sterilisation
  • research and development
  • semiconductor technology
  • plastic technology
The plasma system Pico UHP doesn't have a stainless steel chamber; thus, it is suitable for applications in which vestiges of chrome, nickel and iron are inconveniant.
  Prospekt FEMTO (PDF 1007 KB)
 


All plasma systems can be combined in the most diverse variations. The following overview is a help to get an overview of the most usual plasma systems.
   
 

Technical Data:
Femto UHP (version 1)

switchgear cabinet:
W 345 mm, H 220 mm, D 420 mm
chamber:
Ø 95 mm, L 270 mm, Opening Ø 90 mm
materials:
quartz or borosilicate glass front-and backside of the chamber: aluminium chamber volume:
approx. 1,9 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:

1 pc. tray
control:
semi-automatic control, process time
by timer

options / accessories



 
Femto UHP: Plasma cleaner, plasma asher, plasma activator


FEMTO UHP(version 1): Process development, cleaning, activating, etching (small series)
Price on request




Technical Data:
Femto UHP (version 2)

switchgear cabinet:
W 560 mm, H 310 mm, D 600 mm
chamber:
W 95 mm, L 270 mm, Opening Ø 90 mm
materials:
quartz or borosilicate glass front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:

1 pc. tray
control:
semi-automatic control, process time
by timer

options / accessories



 
Femto UHP with door: Plasma cleaner, plasma asher, plasma activator

FEMTO UHP (version 2): Process development, cleaning, activating, etching (with door)
Price on request
   
 

Technical Data:
Femto UHP (version 3)

switchgear cabinet:
W 562 mm, H 211 mm, D 420 mm
chamber:
Ø 95 mm, L 270 mm,
Opening Ø 90 mm
materials:
quartz or borosilicate glass front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:

1 pc. tray
control:
semi-automatic control, process time
by timer
Pressure sensor:
Pirani

options / accessories



Plasmasystem FEMTO LF UHP  cleaning, etching, activating any surface

FEMTO UHP (version 3) : Process development, cleaning, activating, etching (small series)
Price on request
 


 

Technical Data:
Femto UHP (version 4)

switchgear cabinet:
W 562 mm, H 460 mm, D 550 mm
chamber:
Ø 95 mm, L 270 mm,
Opening Ø 90 mm
materials:
quartz or borosilicate glass front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
3 gas channel through MFC
generator:
40kHz/0-100 W
(option: 13,56 MHz o. 2,45 GHz)
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:

1 pc. tray
control:
PC control runs under Windows (To learn more about PC control, please refer to our pages.)

options / accessories

Plasmasystem FEMTO UHP with PC control cleaning, etching, activating any surface
FEMTO-PC UHP (version 4) : Process development, cleaning, activating, etching (small series)
Price on request
 

Technical Data:
Femto UHP (version 5)

switchgear cabinet:
W 320 mm, H 500 mm, D 420 mm
chamber:
W 95 mm, H 270 mm,
Opening Ø 95 mm
materials:
quartz or borosilicate glass front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:

1 pc. tray
control:
semi-automatic control, process time
by time or automatic
Pressure sensor:
Pirani

options / accessories



Plasmasystem FEMTO UHP V LF cleaning, etching, activating any surface

FEMTO UHP (version 5) : Process development, cleaning, activating, etching (small series)
Price on request
 

The mentioned prices are without obligation
Please contact us if you have technical questions.

 

   
   
   
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