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STANDARD PLASMA SYSTEMS
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[ FEMTO UHP]
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1,9 litres
laboratory system FEMTO UHP (Ultra High Purity) with semi-automatic control is mainly
used for:
- small scale production
- analysis (SEM, TEM)
- medical technology
- sterilisation
- research and development
- semiconductor technology
- plastic technology
The plasma system Pico UHP doesn't have a stainless steel chamber; thus, it is suitable for applications in which vestiges of chrome, nickel and iron are inconveniant.
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Prospekt
FEMTO (PDF 1007 KB) |
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All plasma systems can be combined in the most diverse variations. The following overview is a help to get an overview of the most usual plasma systems.
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Technical Data:
Femto UHP (version 1)
switchgear cabinet:
W 345 mm, H 220 mm, D 420 mm
chamber:
Ø 95 mm, L 270 mm, Opening Ø 90 mm
materials:
quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
options / accessories
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FEMTO UHP(version 1): Process development, cleaning, activating, etching
(small series)
Price on request
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Technical Data:
Femto UHP (version 2)
switchgear cabinet:
W 560 mm, H 310 mm, D 600 mm
chamber:
W 95 mm, L 270 mm, Opening Ø 90 mm
materials:
quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
one gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
options / accessories
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FEMTO UHP (version 2): Process development, cleaning, activating, etching
(with door)
Price on request |
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Technical Data:
Femto UHP (version 3)
switchgear cabinet:
W 562 mm, H 211 mm, D 420 mm
chamber:
Ø 95 mm, L 270 mm,
Opening Ø 90 mm
materials:
quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by timer
Pressure sensor:
Pirani
options / accessories
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FEMTO UHP (version 3) : Process development, cleaning, activating, etching
(small series)
Price on request |
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Technical Data:
Femto UHP (version 4)
switchgear cabinet:
W 562 mm, H 460 mm, D 550 mm
chamber:
Ø 95 mm, L 270 mm,
Opening Ø 90 mm
materials:
quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
3 gas channel through MFC
generator:
40kHz/0-100 W
(option: 13,56 MHz o. 2,45 GHz)
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
PC control runs under Windows (To learn more about PC control, please refer to our pages.)
options / accessories
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FEMTO-PC UHP (version 4) : Process development, cleaning, activating, etching (small series)
Price on request |
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Technical Data:
Femto UHP (version 5)
switchgear cabinet:
W 320 mm, H 500 mm, D 420 mm
chamber:
W 95 mm, H 270 mm,
Opening Ø 95 mm
materials:
quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 1,9 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control:
semi-automatic control, process time
by time or automatic
Pressure sensor:
Pirani
options / accessories
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FEMTO UHP (version 5) : Process development, cleaning, activating, etching
(small series)
Price on request |
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The mentioned prices are without obligation
Please contact us if you have technical questions.
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