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Technical Data:
switchgear cabinet:
W 1000 mm, H 2.100 mm, D 1000 mm
chamber:
W 400 mm, D 625 mm, H 600 mm
chamber volume:
approx. 100 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D65B (65 m³/h)
trays:
up to 16 trays
(optional: rotary drum)
control:
PC control (Windows)
options / accessories
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TETRA-150-LF for cleaning, activation and etching in
production.
Sixfold tray and rotary drum for TETRA systems. |
