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STANDARD PLASMA SYSTEMS

 

[ TETRA-150-LF-PC ]

   
  The production system TETRA-150-LF-PC with 150 litres chamber volume and PC-control is used in the production for cleaning, etching and activation.
   
  Brochure TETRA (PDF 815 KB)
   
   
 
 

Technical Data:

switchgear cabinet:
W 1000 mm, H 2.100 mm, D 1000 mm
chamber:
W 400 mm, D 625 mm, H 600 mm
chamber volume:
approx. 150 litres
gas supply:
max. 2 gas channels through MFC
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D65B (65 m³/h)
trays:
up to 16 trays
(optional: rotary drum)
control:
PC control (Windows)

options / accessories

 
TETRA-150-LF-PC for cleaning, activation and etching in production

TETRA-150-LF-PC for cleaning, activation and etching in production.

Sixfold tray and rotary drum for TETRA systems

Sixfold tray and rotary drum for TETRA systems.
   
   
  Please contact us if you have technical questions.
   
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