PLASMA SYSTEMS

• 13.56 MHz - generator
• 2.45 GHz - generator (microwave)
• semi automatic control
• fully automatic control
  comfortable handling of the system
• PC-control
  comfortable handling of the system and documetations of the processes
• additional gas channels
• automatic door
• automatic door plasma systems
• barcode reader
• bias voltage measurement
• butterfly valves
• carbon exhaust filter
• corrosive gas version
• custom made trays
  for optimal use of chamber volume
• device for powder treatment
• faraday box
• gas shower
  for homogeneous dosage of monomers in plasma poymerisation processes
• glass vacuum chambers (borosilicate or quartz)
• heating plate
• ion measuring sensor
  indispensable for plasma poymerisation processes and processes involving corrosive gases
• intake filter for vacuum pump
• label printer
• label reader
• longer vacuum chamber (Femto, Pico, Nano, …)
• monomer bottle
  for easy dosage of volatile liquids
• network connection
• polymerisation accessories
• pressure reducing valve for gas bottle
• quartz glass boat
• reel to reel system
  for treatment of foils / lead frames
• RIE electrode
• rotary drum
  for example: treatment of bulk materials
• safety valve
• service contract
  for using of flammable gases for example hydrogen, ethyne …
• spare parts set
• special elclectrodes and trays
• special flanges / additional flanges
• special software
• special vacuum chambers
• temperature measuring
• test inks
• vacuum pump systems

Most of these options / accessories can also be introduced after production