| For plasma treatment of large samples it may be
suitable to adapt the shape of the electrode.
This guarantees uniform etching of the complete samples including
pits. |
|
For treatment of foil or lead-frames, the
complete drum is introduced to the chamber. For plasma treatment
the sheet is led along the electrode by a winding mechanism.
After the end of the process, the treated and wound up foil
is removed from the chamber. |
