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STANDARD PLASMA SYSTEMS

 

[ TETRA-100-LF-PC ]

   
  The production system TETRA-100-LF-PC with 100 litres chamber volume and PC-control is used in the production for cleaning, etching and activation.
   
  Brochure TETRA (PDF 815 KB)
   
   
 
 

Technical Data:

switchgear cabinet:
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 400 mm, D 625 mm, H 400 mm
chamber volume:
approx. 100 litres
gas supply:
max. 3 gas channels through MFC
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D40B (40 m³/h)
trays:
up to 10 trays
(optional: rotary drum)
control:
PC control (Windows)

options / accessories

 
TETRA-100-LF-PC for cleaning, activation and etching in production

TETRA-100-LF-PC for cleaning, activation and etching in production.

Sixfold tray and rotary drum for TETRA systems

Sixfold tray and rotary drum for TETRA systems.
   
   
  Please contact us if you have technical questions.
   
   
   
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