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Technical Data:
switchgear cabinet:
W 600 mm, H 1100 mm, D 650 mm
chamber:
W 305 mm, H 300 mm, L 370 mm
(optional: L 625 mm)
chamber volume:
approx. 34 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/0-1000 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D16B (16 m³/h)
trays:
up to 6 trays
(optional: rotary drum)
control:
fully automatic control, process time by timer
options / accessories
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TETRA-30-LF system: With fully automatic control. Build
for production, cleaning, activation, etching. |
