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Technical Data:
switchgear cabinet:
W 600 mm, H 600 mm, D 600 mm
chamber:
W 160 mm, H 160 mm, D 320 mm
chamber volume:
approx. 8 litres
gas supply:
2 gas channels through needle valves
generator:
1 pc. (40 kHz)
(optional: 13,56 MHz o. 2,45 GHz)
control:
fully automatic control, process time by timer
options / accessories
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TETRA-8-LF:
with fully automatic control |
