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STANDARD PLASMA SYSTEMS

 

[ PICO UHP ]

   
  The plasma system PICO UHP with 4 litres chamber volume and semi-automatic control is mainly used for:
  • small scale production
  • analysis (SEM, TEM)
  • medical technology
  • research and development
  • semi conductor technology
  • plastic technology
The plasma system Pico UHP doesn't have a stainless steel chamber; thus, it is suitable for applications in which vestiges of chrome, nickel and iron are inconveniant.
   
   
 
 

Technical Data:

switchgear cabinet:
W 550 mm, H 330 mm, D 500 mm
chamber:
Ø 130 mm, L 300 mm
chamber opening Ø: 125 mm
materials: quartz or borosilicate glass
front-and backside of the chamber: aluminium
chamber volume:
approx. 4 litres
gas supply:
two gas channels through needle valve
generator:
40kHz/100 W, infinitely variable
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type Trivac D2.5B (2.5 m³/h)
trays:
1 pc. tray
control:
semi-automatic, process time by timer

options / accessories

 
PICO UHP: It is also possible to use this system for cleaning of optical parts.


PICO UHP: It is also possible to use this system for cleaning of optical parts.


 Plasma in PICO UHP

Plasma in PICO UHP.


   
   
  The mentioned prices are without obligation
Please contact us if you have technical questions.
   
   
   
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