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A gas [ for example Hexamethyldisiloxane (HMDSO), Hexamethyldisilazane
(HMDSN), Tetraethylen glycol dimethyl ether, C2F6, …] is introduced
to the plasma chamber. Because of plasmapolymerization, layers
will be deposited on the surface.
Applications:
- Deposition of hydrophobic layers
- Deposition of hydrophilic layers
- Application e.g. as diffusion barrier
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