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Turbomolecular pump
Turbomolecular pumps, sometimes also termed as turbo pumps are pumps for extremely low pressure (down to 10-10 mbar), composed of series of aligning rotors and stators, comparable to a jet engine. The turning frequencies of turbomolecular pumps amount several 10000 /min. As the pumping volume of turbomolecular pumps decreases with increasing pressure, they can only be run in connection with another pump, usually a rotating vane pump. Turbomolecular pumps are often used in plasma devices when very low pressures not available with other pump types (rotating vane, roots) are desired.
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