diener electronic : Plasma colour : Plasma Oberflächentechnologie, Plasmaanlagen, Plasmabeam


	Plasma colour Plasma color is caused by emission of high energetic atoms, ions or molecules during relaxation to less energetic states. As the energy states in every gas have different differences, every process gas features different characteristic emissions and hence different characteristic colors. The typical colours of several gases frequently employed in plasma processes are as follows: CF4: blue SF6: white blue SiF4: light blue SiCl4: light blue Cl2: whitish green CCl4: whitish green H2: pink O2: pale yellow N2: red to yellow Br2: reddish He: red to violet Ne: brick red Ar: dark red Apart from the determination of the process gas, the plasma colour can also be used for a qualitative estimation of the process gases purity from contaminations.

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